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Publications information icon

The Etch Rate Variations of p+Silicon Wafers in Aqueous KOH Solutions as a Function of Processing Conditions

Peer-reviewed
Kilpinen, P.; Haimi, E.; Lindroos, V.K.
MATERIALS RESEARCH SOCIETY2000Publications information icon

Modelling of microelectromechanical systems (MEMS)- theoretical and computational challenges

Peer-reviewed
Nieminen, Risto; Järvinen, J.; Råback, P.
Teknillinen korkeakoulu1999Publications information icon

Systematic design approach for capacitively coupled microelectromechanical filters

Peer-reviewed
DOI
10.1109/TUFFC.2006.1678194
Alastalo, Ari T.; Kaajakari, Ville
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control2006Publications information icon

Amorphous Mo-N and Mo-Si-N films in microelectromechanical systems

Peer-reviewed
DOI
10.1111/j.1460-2695.2005.00887.x
Kattelus, Hannu; Ylönen, Mari; Blomberg, Martti
Fatigue & Fracture of Engineering Materials & Structures2005Publications information icon

Low-temperature bonding of thick-film polysilicon for microelectromechanical system (MEMS)

Peer-reviewed
DOI
10.1007/s00542-005-0037-3
Luoto, Hannu; Suni, Tommi; Kulawski, Martin; Henttinen, Kimmo; Kattelus, Hannu
Microsystem Technologies2006Publications information icon

Analysis of a MEMS transmission line

Peer-reviewed
DOI
10.1109/TMTT.2003.815270
Alastalo, A.T.; Mattila, T.; Seppä, H.
IEEE Transactions on Microwave Theory and Techniques2003Publications information icon

Internet of Things Based Monitoring of Large Rotor Vibration With a Microelectromechanical Systems Accelerometer

Peer-reviewed
Open access
DOI
10.1109/ACCESS.2019.2927793
Koene, Ivar; Viitala, Raine; Kuosmanen, Petri
IEEE Access2019Publications information icon

Parametric study of square-extensional mode in piezoelectrically transduced microelectromechanical resonators

Peer-reviewed
Lipiäinen, L.; Kokkonen, K.; Jaakkola, A.; Kaivola, M.
-2011Publications information icon

G-band distributed microelectromechanical components based on CMOS compatible fabrication

Peer-reviewed
DOI
10.1109/TMTT.2008.916885
Vähä-Heikkilä, Tauno; Ylönen, Mari
IEEE Transactions on Microwave Theory and Techniques2008Publications information icon

Intermodulation in capacitively coupled microelectromechanical filters

Peer-reviewed
DOI
10.1109/LED.2005.846589
Alastalo, A.T.; Kaajakari, V.
IEEE Electron Device Letters2005

The Etch Rate Variations of p+Silicon Wafers in Aqueous KOH Solutions as a Function of Processing Conditions

Peer-reviewed
2000

Modelling of microelectromechanical systems (MEMS)- theoretical and computational challenges

Peer-reviewed
1999

Systematic design approach for capacitively coupled microelectromechanical filters

Peer-reviewed
DOI
10.1109/TUFFC.2006.1678194
2006

Amorphous Mo-N and Mo-Si-N films in microelectromechanical systems

Peer-reviewed
DOI
10.1111/j.1460-2695.2005.00887.x
2005

Low-temperature bonding of thick-film polysilicon for microelectromechanical system (MEMS)

Peer-reviewed
DOI
10.1007/s00542-005-0037-3
2006

Analysis of a MEMS transmission line

Peer-reviewed
DOI
10.1109/TMTT.2003.815270
2003

Internet of Things Based Monitoring of Large Rotor Vibration With a Microelectromechanical Systems Accelerometer

Peer-reviewed
Open access
DOI
10.1109/ACCESS.2019.2927793
2019

Parametric study of square-extensional mode in piezoelectrically transduced microelectromechanical resonators

Peer-reviewed
2011

G-band distributed microelectromechanical components based on CMOS compatible fabrication

Peer-reviewed
DOI
10.1109/TMTT.2008.916885
2008

Intermodulation in capacitively coupled microelectromechanical filters

Peer-reviewed
DOI
10.1109/LED.2005.846589
2005